Hydrogen loss and its improved retention in hydrogen plasma treated a-SiN :H films: ERDA study with 100 MeV Ag7+ ions
نویسندگان
چکیده
منابع مشابه
Two-Center Effect on Low-Energy Electron Emission in Collisions of 1-MeV/u Bare Ions with Atomic Hydrogen, Molecular Hydrogen, and Helium. I. Atomic Hydrogen
متن کامل
Thermal Plasma Source of Hydrogen Atoms and Ions
A cascade arc is used as a source for a hydrogen/argon particle beam. The plasma is produced at thermal plasma conditions in the pressure range of 0.1 to 1 bar. It is expanded with a high velocity into a vacuum chamber. Measurements with a Langmuir double probe and with a mass spectrometer are performed. The resulting parameters of the plasma and the extracted ions are discussed. Molecular proc...
متن کاملTwo-Center Effect on Low-Energy Electron Emission in Collisions of 1-MeV/u Bare Ions with Atomic Hydrogen, Molecular Hydrogen, and Helium: II. H2 and He
متن کامل
The Transport of Neutral Hydrogen Atoms in a Hydrogen Plasma
An analytical version of the discrete ordinates method is used to solve a class of boundaryvalue problems based on a linear Boltzmann equation relevant to the transport of neutral hydrogen atoms in a hydrogen plasma. In addition to a complete development of the discrete ordinates method for the considered application, the computational algorithm is implemented to yield very accurate results for...
متن کاملH- production in pure hydrogen discharges of surface-plasma sources
2014 The pure-hydrogen discharges in surface-plasma sources with a semiplanotron electrode configuration are described. In short pulse (10-3 s) mode the extracted Hemission density was up to 1.1 A/cm2 at cathode discharge current density 60 A/cm2. The multi-slit short pulse extraction delivered the Houtput with current of up to 1 A. In the long pulse (0.6 s) mode the Hyield was 0.15 A at discha...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
ژورنال
عنوان ژورنال: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
سال: 2018
ISSN: 0168-583X
DOI: 10.1016/j.nimb.2018.03.005