Hydrogen loss and its improved retention in hydrogen plasma treated a-SiN :H films: ERDA study with 100 MeV Ag7+ ions

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ژورنال

عنوان ژورنال: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

سال: 2018

ISSN: 0168-583X

DOI: 10.1016/j.nimb.2018.03.005